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Editorial by D2S CEO Aki Fujimura
Presented by D2S CEO Aki Fujimura at the SPIE Photomask Technology Conference, Sept. 30, 2021
Presented by D2S CEO Aki Fujimura at the SPIE Photomask Technology Conference, Sept. 29, 2021
Will variable-shape eBeam (VSB) photomask writers ever be used to write curvilinear shapes?
New tools not only need to check for errors but repair them as well.
What trade-offs are involved in defining a new curvilinear data format to reduce file sizes?